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Product No. W7095B Product Name Silicon carbide (6H-SiC)
Category Wafer Specifications 2-330-N-#01B
Technical Report
 

Silicon carbide wafer options: 
(1)    Polytype: 6H or 4H 
(2)    Dopant: Nitrogen or 
(3)    Diameter: 2” or 3” or (10 mmx10mm, 20mmx20mm
(4)    Thickness: 0.33mm or 0.43mm
(5)    Orientation: off [0001] 0°, 3.5°, 4°, 8°, 
(6)    MPD: Grade A-10 /cm2Grade B-30 /cm2, Grade C-50 /cm2
(7)    Polish options: 
Si face: 
    P1: CMP,EPI-ready, Ra<0.5nm 
P2: Optical polish Ra<1nm 
P3: Lapping, Ra<1um 
C face:  
    P2: Optical polish Ra<1nm 
P3: Lapping, Ra<1um 

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