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Product No. W7095C Product Name Silicon carbide (6H-SiC)
Category Wafer Specifications 2-330-N-#01C
Technical Report
Silicon carbide wafer options:  
(1)    Polytype: 6H or 4H  
(2)    Dopant: Nitrogen or  
(3)    Diameter: 2” or 3” or (10 mmx10mm, 20mmx20mm)  
(4)    Thickness: 0.33mm or 0.43mm,  
(5)    Orientation: off [0001] 0°, 3.5°, 4°, 8°,  
(6)    MPD: Grade A: 10 /cm2, Grade B: 30 /cm2, Grade C: 50 /cm2.  
(7)    Polish options:  
Si face:  
    P1: CMP,EPI-ready, Ra<0.5nm  
P2: Optical polish Ra<1nm  
P3: Lapping, Ra<1um  
C face:   
    P2: Optical polish Ra<1nm  
P3: Lapping, Ra<1um 
MSDS
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